001050094 001__ 1050094
001050094 005__ 20251223202203.0
001050094 0247_ $$2doi$$a10.1063/5.0232252
001050094 0247_ $$2ISSN$$a0021-8979
001050094 0247_ $$2ISSN$$a0148-6349
001050094 0247_ $$2ISSN$$a1089-7550
001050094 0247_ $$2ISSN$$a2163-5102
001050094 0247_ $$2datacite_doi$$a10.34734/FZJ-2025-05802
001050094 037__ $$aFZJ-2025-05802
001050094 082__ $$a530
001050094 1001_ $$00000-0002-9596-5889$$aTröger, Jan$$b0$$eCorresponding author
001050094 245__ $$aOptimizing time-of-flight secondary ion mass spectrometry depth profiles of semiconductor heterostructures
001050094 260__ $$aMelville, NY$$bAmerican Inst. of Physics$$c2025
001050094 3367_ $$2DRIVER$$aarticle
001050094 3367_ $$2DataCite$$aOutput Types/Journal article
001050094 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1766494637_3772
001050094 3367_ $$2BibTeX$$aARTICLE
001050094 3367_ $$2ORCID$$aJOURNAL_ARTICLE
001050094 3367_ $$00$$2EndNote$$aJournal Article
001050094 536__ $$0G:(DE-HGF)POF4-5221$$a5221 - Advanced Solid-State Qubits and Qubit Systems (POF4-522)$$cPOF4-522$$fPOF IV$$x0
001050094 588__ $$aDataset connected to CrossRef, Journals: juser.fz-juelich.de
001050094 7001_ $$00009-0004-8987-1642$$aKersting, Reinhard$$b1
001050094 7001_ $$00000-0002-8380-2257$$aHagenhoff, Birgit$$b2
001050094 7001_ $$00000-0003-3793-2787$$aBougeard, Dominique$$b3
001050094 7001_ $$00000-0002-2042-4754$$aAbrosimov, Nikolay V.$$b4
001050094 7001_ $$0P:(DE-Juel1)195937$$aKlos, Jan$$b5
001050094 7001_ $$0P:(DE-Juel1)172641$$aSchreiber, Lars$$b6
001050094 7001_ $$00000-0003-3700-6687$$aBracht, Hartmut$$b7
001050094 773__ $$0PERI:(DE-600)1476463-5$$a10.1063/5.0232252$$gVol. 137, no. 2, p. 025301$$n2$$p025301$$tJournal of applied physics$$v137$$x0021-8979$$y2025
001050094 8564_ $$uhttps://juser.fz-juelich.de/record/1050094/files/025301_1_5.0232252.pdf$$yOpenAccess
001050094 909CO $$ooai:juser.fz-juelich.de:1050094$$popenaire$$popen_access$$pVDB$$pdriver$$pdnbdelivery
001050094 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)172641$$aForschungszentrum Jülich$$b6$$kFZJ
001050094 9131_ $$0G:(DE-HGF)POF4-522$$1G:(DE-HGF)POF4-520$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-5221$$aDE-HGF$$bKey Technologies$$lNatural, Artificial and Cognitive Information Processing$$vQuantum Computing$$x0
001050094 9141_ $$y2025
001050094 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)1230$$2StatID$$aDBCoverage$$bCurrent Contents - Electronics and Telecommunications Collection$$d2024-12-18
001050094 915__ $$0LIC:(DE-HGF)CCBY4$$2HGFVOC$$aCreative Commons Attribution CC BY 4.0
001050094 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bJ APPL PHYS : 2022$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0113$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
001050094 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0430$$2StatID$$aNational-Konsortium$$d2024-12-18$$wger
001050094 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2024-12-18
001050094 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2024-12-18
001050094 920__ $$lyes
001050094 9201_ $$0I:(DE-Juel1)PGI-11-20170113$$kPGI-11$$lJARA Institut Quanteninformation$$x0
001050094 980__ $$ajournal
001050094 980__ $$aVDB
001050094 980__ $$aUNRESTRICTED
001050094 980__ $$aI:(DE-Juel1)PGI-11-20170113
001050094 9801_ $$aFullTexts