TY  - JOUR
AU  - Tröger, Jan
AU  - Kersting, Reinhard
AU  - Hagenhoff, Birgit
AU  - Bougeard, Dominique
AU  - Abrosimov, Nikolay V.
AU  - Klos, Jan
AU  - Schreiber, Lars
AU  - Bracht, Hartmut
TI  - Optimizing time-of-flight secondary ion mass spectrometry depth profiles of semiconductor heterostructures
JO  - Journal of applied physics
VL  - 137
IS  - 2
SN  - 0021-8979
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - FZJ-2025-05802
SP  - 025301
PY  - 2025
LB  - PUB:(DE-HGF)16
DO  - DOI:10.1063/5.0232252
UR  - https://juser.fz-juelich.de/record/1050094
ER  -