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@ARTICLE{Trger:1050094,
      author       = {Tröger, Jan and Kersting, Reinhard and Hagenhoff, Birgit
                      and Bougeard, Dominique and Abrosimov, Nikolay V. and Klos,
                      Jan and Schreiber, Lars and Bracht, Hartmut},
      title        = {{O}ptimizing time-of-flight secondary ion mass spectrometry
                      depth profiles of semiconductor heterostructures},
      journal      = {Journal of applied physics},
      volume       = {137},
      number       = {2},
      issn         = {0021-8979},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2025-05802},
      pages        = {025301},
      year         = {2025},
      cin          = {PGI-11},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-11-20170113},
      pnm          = {5221 - Advanced Solid-State Qubits and Qubit Systems
                      (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5221},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1063/5.0232252},
      url          = {https://juser.fz-juelich.de/record/1050094},
}