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Conference Presentation (Other) FZJ-2026-01165
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Plasma etching resistance of rare earth substituted yttrium aluminium garnets

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2025

XIXth ECerS Conference 2025, ECerS 2025, DresdenDresden, Germany, 31 Aug 2025 - 4 Sep 20252025-08-312025-09-04


Note: No DFG funding
Contributing Institute(s):
  1. Werkstoffsynthese und Herstellungsverfahren (IMD-2)
Research Program(s):
  1. 1221 - Fundamentals and Materials (POF4-122) (POF4-122)

Appears in the scientific report 2025
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Document types > Presentations > Conference Presentations
Institute Collections > IMD > IMD-2
Workflow collections > Public records
Publications database
 Record created 2026-01-27, last modified 2026-02-20
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