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@ARTICLE{Graziosi:1053109,
author = {Graziosi, Patrizio and Marian, Damiano and Tomadin, Andrea
and Roddaro, Stefano and Concepción, Omar and
Tiscareño-Ramírez, Jhonny and Kaul, Prateek and
Corley-Wiciak, Agnieszka Anna and Buca, Dan and Capellini,
Giovanni and Virgilio, Michele},
title = {{E}pitaxial {S}i{G}e{S}n {A}lloys for {CMOS}-{C}ompatible
{T}hermoelectric {D}evices},
journal = {ACS applied energy materials},
volume = {8},
number = {13},
issn = {2574-0962},
address = {Washington, DC},
publisher = {ACS Publications},
reportid = {FZJ-2026-01449},
pages = {9075 - 9082},
year = {2025},
abstract = {The integration of thermoelectric devices into mainstream
microelectronictechnological platforms could be a major
breakthrough in various fieldswithin the so-called Green-IT
realm. In this article, the thermoelectric properties
ofheteroepitaxial SiGeSn alloys, an emergent CMOS-compatible
material system, areevaluated to assess their possible
application in thermoelectric devices. To this
purpose,starting from the experimentally low lattice thermal
conductivity of SiGeSn/Ge/Si layersof about ∼1 to 2 W/m·K
assessed by means of 3-ω measurements, the figure of
meritsare calculated through the use of Boltzmann transport
equation, taking into account therelevant intervalley
scattering processes, peculiar of this multivalley material
system.Values for the figure of merit ZT exceeding 1 have
been obtained for both p- and n-typematerial at operating
temperatures within the 300−400 K range, i.e., at typical
on-chiptemperatures. In this interval, the predicted power
factor also features very competitivevalues on the order of
20 μW/cm ·K2. Our finding indicates that this emergent
class ofSi-based materials has extremely good prospects for
real-world applications and canfurther stimulate scientific
investigation in this ambit.},
cin = {PGI-9},
ddc = {540},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {5234 - Emerging NC Architectures (POF4-523) / DFG project
G:(GEPRIS)537127697 - Thermoelektrische Eigenschaften von
SiGeSn-Mikrobauelementen (537127697)},
pid = {G:(DE-HGF)POF4-5234 / G:(GEPRIS)537127697},
typ = {PUB:(DE-HGF)16},
doi = {10.1021/acsaem.5c00733},
url = {https://juser.fz-juelich.de/record/1053109},
}