Patent

FZJ-2026-02486

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png METHOD FOR PRODUCING A TEM GRID AND TEM GRID

Faley, M. (Corresponding author)FZJ* ; Gunkel, F.FZJ* ; Thomsen, J.FZJ* ; Tavabi, A. H.FZJ* ; Dittmann, R.FZJ* ; Dunin-Borkowski, R.FZJ*

2026

Patent No.: EP4693362A1; 24193235.9

Abstract: The invention refers to a method of manufacturing a TEM grid comprising the sequence of: creating a hole (3) through a monocrystalline substrate (1 ), attaching a monocrystalline membrane (2) to the substrate (1 ), wherein the substrate (1) and the membrane (2) are made of the same monocrystalline material.The invention further refers to a TEM grid comprising a monocrystalline substrate (1) and a monocrystalline membrane (2) which is attached to the substrate (1 ), wherein the substrate (1) and the membrane (2) are made of the same monocrystalline material, preferably SrTi03.

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Contributing Institute(s):

1. Physik Nanoskaliger Systeme (ER-C-1)

Research Program(s):

1. 5351 - Platform for Correlative, In Situ and Operando Characterization (POF4-535) (POF4-535)

Appears in the scientific report 2026

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