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| 001 | 111264 | ||
| 024 | 7 | _ | |a G:(DE-HGF)29.86.0 |2 G:(DE-HGF) |
| 024 | 7 | _ | |a G:(DE-Juel1)FUEK66 |2 G:(DE-Juel1) |
| 035 | _ | _ | |a G:(DE-Juel1)FUEK66 |
| 150 | _ | _ | |a Ionen- und Lithographietechnik |
| 500 | _ | _ | |a Record converted from VDB: 14.11.2012 |
| 550 | 1 | _ | |0 G:(DE-Juel1)FUEP66 |2 G:(DE-Juel1) |a Grundlagenforschung zur Informationstechnik |w t |
| 909 | C | O | |o oai:juser.fz-juelich.de:111264 |p authority:GRANT |p authority |
| 970 | _ | _ | |a G:(DE-Juel1)FUEK66 |
| 980 | _ | _ | |a G |
| 980 | _ | _ | |a ConvertedRecord |
| 980 | _ | _ | |a AUTHORITY |
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