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@ARTICLE{Wicklein:111873,
author = {Wicklein, S. and Sambri, A. and Amoruso, S. and Wang, X.
and Bruzzese, R. and Koehl, A. and Dittmann, R.},
title = {{P}ulsed laser ablation of complex oxides: {T}he role of
congruent ablation and preferential scattering for the film
stoichiometry},
journal = {Applied physics letters},
volume = {101},
issn = {0003-6951},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {PreJuSER-111873},
pages = {131601},
year = {2012},
note = {The research has received funding from European Union
Seventh Framework Programme (FP7/2007-2013) under Grant
Agreement No. 264098-MAMA and the Deutsche
Forschungsgemeinschaft (SFB 917). We thank C. Aruta and E.
Di Gennaro for their valuable help.},
abstract = {By combining structural and chemical thin film analysis
with detailed plume diagnostics and modeling of the laser
plume dynamics, we are able to elucidate the different
physical mechanisms determining the stoichiometry of the
complex oxides model material SrTiO3 during pulsed laser
deposition. Deviations between thin film and target
stoichiometry are basically a result of two effects, namely,
incongruent ablation and preferential scattering of lighter
ablated species during their motion towards the substrate in
the O-2 background gas. On the one hand, a progressive
preferential ablation of the Ti species with increasing
laser fluence leads to a regime of Ti-rich thin film growth
at larger fluences. On the other hand, in the low laser
fluence regime, a more effective scattering of the lighter
Ti plume species results in Sr rich films. (C) 2012 American
Institute of Physics. [http://dx.doi.org/10.1063/1.4754112]},
keywords = {J (WoSType)},
cin = {JARA-FIT / PGI-7},
ddc = {530},
cid = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-7-20110106},
pnm = {Grundlagen für zukünftige Informationstechnologien / MAMA
- Unlocking research potential for multifunctional advanced
materials and nanoscale phenomena (264098)},
pid = {G:(DE-Juel1)FUEK412 / G:(EU-Grant)264098},
shelfmark = {Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000309426800016},
doi = {10.1063/1.4754112},
url = {https://juser.fz-juelich.de/record/111873},
}