Hauptseite > Publikationsdatenbank > Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry > print

001     111873
005     20180211173651.0
024 7 _ |2 DOI
|a 10.1063/1.4754112
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|a WOS:000309426800016
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|a 2128/7805
037 _ _ |a PreJuSER-111873
041 _ _ |a eng
082 _ _ |a 530
084 _ _ |2 WoS
|a Physics, Applied
100 1 _ |0 P:(DE-Juel1)VDB95416
|a Wicklein, S.
|b 0
|u FZJ
245 _ _ |a Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry
260 _ _ |a Melville, NY
|b American Institute of Physics
|c 2012
300 _ _ |a 131601
336 7 _ |a Journal Article
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440 _ 0 |0 562
|a Applied Physics Letters
|v 101
|x 0003-6951
|y 13
500 _ _ |3 POF3_Assignment on 2016-02-29
500 _ _ |a The research has received funding from European Union Seventh Framework Programme (FP7/2007-2013) under Grant Agreement No. 264098-MAMA and the Deutsche Forschungsgemeinschaft (SFB 917). We thank C. Aruta and E. Di Gennaro for their valuable help.
520 _ _ |a By combining structural and chemical thin film analysis with detailed plume diagnostics and modeling of the laser plume dynamics, we are able to elucidate the different physical mechanisms determining the stoichiometry of the complex oxides model material SrTiO3 during pulsed laser deposition. Deviations between thin film and target stoichiometry are basically a result of two effects, namely, incongruent ablation and preferential scattering of lighter ablated species during their motion towards the substrate in the O-2 background gas. On the one hand, a progressive preferential ablation of the Ti species with increasing laser fluence leads to a regime of Ti-rich thin film growth at larger fluences. On the other hand, in the low laser fluence regime, a more effective scattering of the lighter Ti plume species results in Sr rich films. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4754112]
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|a Amoruso, S.
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|a Wang, X.
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|a Bruzzese, R.
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773 _ _ |0 PERI:(DE-600)1469436-0
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|g Vol. 101, p. 131601
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|t Applied physics letters
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|x 0003-6951
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856 7 _ |u http://dx.doi.org/10.1063/1.4754112
856 4 _ |u https://juser.fz-juelich.de/record/111873/files/FZJ-111873.pdf
|y Published under German "Allianz" Licensing conditions on 2012-09-24. Available in OpenAccess from 2012-09-24
|z Published final document.
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