%0 Conference Paper
%A Kärkkänen, I.
%A Heikkilä, M.
%A Niinistö, J.
%A Ritala, M.
%A Leskelä, M.
%A Hoffmann-Eifert, S.
%A Waser, R.
%T Investigation of structure and resistive switching in ZrO2/TiO2 films grown by atomic layer deposition
%M PreJuSER-111889
%D 2012
%Z Record converted from VDB: 16.11.2012
%< 2nd Winterschool of Enhance
Y2 9 Jan 2012
M2 Helsinki, Finland, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/111889