%0 Conference Paper
%A Kärkkänen, I.
%A Heikkilä, M.
%A Niinistö, J.
%A Ritala, M.
%A Leskelä, M.
%A Hoffmann-Eifert, S.
%A Waser, R.
%T Investigation of morphology and resistive switching in ZrO2/TiO2 films grown by atomic layer deposition
%M PreJuSER-111890
%D 2012
%Z Record converted from VDB: 16.11.2012
%< DPG-Frühjahrstagung
Y2 25 Mar 2012
M2 Berlin, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/111890