%0 Conference Paper
%A Reiners, M.
%A Aslam, N.
%A Lentz, F.
%A Hoffmann-Eifert, S.
%A Waser, R.
%T ALD process control for tailoring the nanostructure of TiO2 films for resistive switching applications
%M PreJuSER-111895
%D 2012
%Z Record converted from VDB: 16.11.2012
%< Nature Conference on Frontiers in Electronic Materials: Correlation Effects and Memristive Phenomena
Y2 17 Jun 2012
M2 Aachen, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/111895