%0 Conference Paper
%A Zhao, Q.T.
%A Knoll, L.
%A Zhang, B.
%A Buca, D.
%A Hartmann, J.-M.
%A Mantl, S.
%T Ultrathin epitaxial Ni-silicide contacts on Si and SiGe: Structural and electrical investigation
%M PreJuSER-112044
%D 2012
%Z Record converted from VDB: 16.11.2012
%< Proc. Materials for Advanced Metallization (MAM 2012), Grenoble, France 2012
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/112044