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000112044 245__ $$aUltrathin epitaxial Ni-silicide contacts on Si and SiGe: Structural and electrical investigation
000112044 260__ $$c2012
000112044 29510 $$aProc. Materials for Advanced Metallization (MAM 2012), Grenoble, France 2012
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000112044 9141_ $$y2012
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