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TY - CONF AU - Zhao, Q.T. AU - Knoll, L. AU - Zhang, B. AU - Buca, D. AU - Hartmann, J.-M. AU - Mantl, S. TI - Ultrathin epitaxial Ni-silicide contacts on Si and SiGe: Structural and electrical investigation M1 - PreJuSER-112044 PY - 2012 N1 - Record converted from VDB: 16.11.2012 LB - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7 UR - https://juser.fz-juelich.de/record/112044 ER -