%0 Conference Paper
%A Schmidt, M.
%A Knoll, L.
%A Richter, S.
%A Schäfer, A.
%A Hartmann, J.-M.
%A Zhao, Q.T.
%A Mantl, S.
%T Si/SiGe Hetero-Structure Tunneling Field Effect Transistors with In-Situ Doped SiGe Source
%M PreJuSER-112047
%D 2012
%Z Record converted from VDB: 16.11.2012
%< Proc. 13th International Conference on Ultimate Integration on Silicon (ULIS), pp.237-240, 2012
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/112047