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024 7 _ |2 DOI
|a 10.1109/LED.2010.2045220
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024 7 _ |2 ISSN
|a 0741-3106
037 _ _ |a PreJuSER-11286
041 _ _ |a eng
082 _ _ |a 620
084 _ _ |2 WoS
|a Engineering, Electrical & Electronic
100 1 _ |0 P:(DE-Juel1)VDB76198
|a Urban, C.
|b 0
|u FZJ
245 _ _ |a Radio-Frequency Study of Dopant-Segregated n-Type SB-MOSFETs on Thin-Body SOI
260 _ _ |a New York, NY
|b IEEE
|c 2010
300 _ _ |a 537 - 539
336 7 _ |a Journal Article
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440 _ 0 |0 2464
|a IEEE Electron Device Letters
|v 31
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500 _ _ |a This work was supported by the European Community's Seventh Framework Program (FP7/2007-2013) under Grant 216171. The review of this letter was arranged by Editor C. Bulucea.
520 _ _ |a We present a detailed direct current and radiofrequency study of fully depleted dopant-segregated Schottky barrier (SB) MOSFETs on thin-body Silicon-on-Insulator. On-wafer scattering-parameter measurements of n-type NiSi source/drain SB-MOSFETs provide an in-depth understanding of key device parameters (transconductances and capacitances) as a function of the implanted arsenic dose, i. e., different SB height. Devices with 80-nm-channel length show a high ON current of 1150 mA/mm and exhibit a unity-gain cutoff frequency of f(T) = 140 GHz.
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653 2 0 |2 Author
|a Dopant segregation (DS)
653 2 0 |2 Author
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|a NiSi
653 2 0 |2 Author
|a radio frequency (RF)
653 2 0 |2 Author
|a scattering-parameters (S-parameters)
653 2 0 |2 Author
|a Schottky barrier (SB)
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|a Emam, M.
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700 1 _ |0 P:(DE-Juel1)VDB76199
|a Sandow, C.
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700 1 _ |0 P:(DE-Juel1)VDB56683
|a Knoch, J.
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700 1 _ |0 P:(DE-Juel1)VDB5539
|a Zhao, Q. T.
|b 4
|u FZJ
700 1 _ |0 P:(DE-HGF)0
|a Raskin, J.-P.
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700 1 _ |0 P:(DE-Juel1)VDB4959
|a Mantl, S.
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|a 10.1109/LED.2010.2045220
|g Vol. 31, p. 537 - 539
|p 537 - 539
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|t IEEE Electron Device Letters
|v 31
|x 0741-3106
|y 2010
856 7 _ |u http://dx.doi.org/10.1109/LED.2010.2045220
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