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%0 Conference Paper %A Owen, J. I. %A Hüpkes, J. %A Bunte, E. %A Pust, S.E. %A Gordijn, A. %T Etching Modulated Surface Textures into Sputtered Al-Doped ZnO Films %M PreJuSER-11471 %D 2010 %Z Record converted from VDB: 12.11.2012 %< 25th European Photovoltaic Solar Energy Conference and Exhibition, 6-10 September, Valencia Spain %F PUB:(DE-HGF)24 %9 Poster %U https://juser.fz-juelich.de/record/11471