TY  - CONF
AU  - Owen, J. I.
AU  - Hüpkes, J.
AU  - Bunte, E.
AU  - Pust, S.E.
AU  - Gordijn, A.
TI  - Etching Modulated Surface Textures into Sputtered Al-Doped ZnO Films
M1  - PreJuSER-11471
PY  - 2010
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/11471
ER  -