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@INPROCEEDINGS{Owen:11471,
      author       = {Owen, J. I. and Hüpkes, J. and Bunte, E. and Pust, S.E.
                      and Gordijn, A.},
      title        = {{E}tching {M}odulated {S}urface {T}extures into {S}puttered
                      {A}l-{D}oped {Z}n{O} {F}ilms},
      reportid     = {PreJuSER-11471},
      year         = {2010},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {25th European Photovoltaic Solar Energy Conference and
                      Exhibition, 6-10 September, Valencia Spain},
      booktitle     = {25th European Photovoltaic Solar
                       Energy Conference and Exhibition, 6-10
                       September, Valencia Spain},
      cin          = {IEF-5},
      cid          = {I:(DE-Juel1)VDB813},
      pnm          = {Erneuerbare Energien},
      pid          = {G:(DE-Juel1)FUEK401},
      typ          = {PUB:(DE-HGF)24},
      url          = {https://juser.fz-juelich.de/record/11471},
}