%0 Conference Paper
%A Knoll, L.
%A Zhao, Q. T.
%A Habicht, S.
%A Urban, C.
%A Boudelle, K.K.
%A Mantl, S.
%T Formation and Characterization of Ultra-Thin Ni Silicides on Strained and Unstrained Silicon
%M PreJuSER-11474
%D 2010
%Z Record converted from VDB: 12.11.2012
%< Extended Abstracts 2010 International Workshop on Junction Technology (IWJT), 2010. - S. 52 - 56
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/11474