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Strained-SiGe p-MOSFET with LaLuO3 as high-k gate dielectric and TiN as metal gate
Yu, W.FZJ* ; Zhang, B.FZJ* ; Zhao, Q. T.FZJ* ; Hartmann, J. M. ; Buca, D.FZJ* ; Nichau, A.FZJ* ; Durgun Özben, E.FZJ* ; Lopes, J. M. J.FZJ* ; Schubert, J.FZJ* ; Ghyselen, B. ; Mantl, S.FZJ*
2010
20106th Workshop of the thematic Network on Silicon-on-Insulator Technology (EUROSOI)
Seminar, Grenoble, FranceGrenoble, France, 25 Jan 20102010-01-25
Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
- Halbleiter-Nanoelektronik (IBN-1)
- Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
- Grundlagen für zukünftige Informationstechnologien (P42)
Appears in the scientific report
2010