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@INPROCEEDINGS{Knoll:11479,
      author       = {Knoll, L. and Zhao, Q. T. and Urban, C. and Habicht, S. and
                      Fox, A. and Mantl, S.},
      title        = {{F}ormation and characterization of {U}ltra-{T}hin
                      {N}i{S}i, {N}i1-x{P}tx{S}i and epitaxial {N}i{S}i2on
                      {S}i(001) substrates},
      reportid     = {PreJuSER-11479},
      year         = {2010},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Materials for Advanced Metallization (MAM) Conference},
      booktitle     = {Materials for Advanced Metallization
                       (MAM) Conference},
      month         = {Mar},
      date          = {2010-03-07},
      organization  = {Mechelen, Belgium, 7 Mar 2010},
      cin          = {IBN-1 / JARA-FIT},
      cid          = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/11479},
}