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@ARTICLE{Jovanovic:12008,
author = {Jovanovic, V. and Biasotto, C. and Nanver, L.K. and Moers,
J. and Grützmacher, D. and Gerharz, J. and Mussler, G. and
van der Cingel, J. and Zhang, J.J. and Bauer, G. and
Schmidt, O.G. and Miglio, L.},
title = {n-{C}hannel {MOSFET}s {F}abricated on {S}i{G}e {D}ots for
{S}train-{E}nhanced {M}obility},
journal = {IEEE Electron Device Letters},
volume = {31},
issn = {0741-3106},
address = {New York, NY},
publisher = {IEEE},
reportid = {PreJuSER-12008},
pages = {1083 - 1085},
year = {2010},
note = {This work was supported by the European Commission's Sixth
Framework Programme under the D-Dot FET project. The review
of this letter was arranged by Editor K. De Meyer.},
abstract = {The silicon germanium dots grown in the Stranski-Krastanow
mode are used to induce biaxial tensile strain in a silicon
capping layer. A high Ge content and correspondingly high Si
strain levels are reached due to the 3-D growth of the dots.
The n-channel MOS devices, referred to in this letter as
DotFETs, are processed with the main gate segment above the
strained Si layer on a single dot. To prevent the
intermixing of the Si/SiGe/Si structure, a novel
low-temperature FET structure processed below 400 degrees C
has been implemented: The ultrashallow source/drain
junctions formed by excimer-laser annealing in the full-melt
mode of ion-implanted dopants are self-aligned to a metal
gate. The crystallinity of the structure is preserved
throughout the processing, and compared to reference
devices, an average increase in the drain current of up to
$22.5\%$ is obtained.},
keywords = {J (WoSType)},
cin = {IBN-1 / JARA-FIT},
ddc = {620},
cid = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Engineering, Electrical $\&$ Electronic},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000283353900005},
doi = {10.1109/LED.2010.2058995},
url = {https://juser.fz-juelich.de/record/12008},
}