%0 Conference Paper
%A Gerharz, J.
%A Padmaraju, K.
%A Moers, J.
%A Grützmacher, D.
%T Etching Titanium Nitride gate stacked on high-k dielectric
%M PreJuSER-12020
%D 2010
%Z Record converted from VDB: 12.11.2012
%< Proceedings  of the 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy from 19 to 22 September 2010
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/12020