000012020 001__ 12020
000012020 005__ 20180208200720.0
000012020 037__ $$aPreJuSER-12020
000012020 1001_ $$0P:(DE-Juel1)VDB76721$$aGerharz, J.$$b0$$uFZJ
000012020 245__ $$aEtching Titanium Nitride gate stacked on high-k dielectric
000012020 260__ $$c2010
000012020 29510 $$aProceedings  of the 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy from 19 to 22 September 2010
000012020 3367_ $$0PUB:(DE-HGF)8$$2PUB:(DE-HGF)$$aContribution to a conference proceedings
000012020 3367_ $$0PUB:(DE-HGF)7$$2PUB:(DE-HGF)$$aContribution to a book
000012020 3367_ $$033$$2EndNote$$aConference Paper
000012020 3367_ $$2ORCID$$aCONFERENCE_PAPER
000012020 3367_ $$2DataCite$$aOutput Types/Conference Paper
000012020 3367_ $$2DRIVER$$aconferenceObject
000012020 3367_ $$2BibTeX$$aINPROCEEDINGS
000012020 500__ $$aRecord converted from VDB: 12.11.2012
000012020 500__ $$3Conference proceedings / Book
000012020 536__ $$0G:(DE-Juel1)FUEK412$$2G:(DE-HGF)$$aGrundlagen für zukünftige Informationstechnologien$$cP42$$x0
000012020 7001_ $$0P:(DE-HGF)0$$aPadmaraju, K.$$b1
000012020 7001_ $$0P:(DE-Juel1)VDB5547$$aMoers, J.$$b2$$uFZJ
000012020 7001_ $$0P:(DE-Juel1)125588$$aGrützmacher, D.$$b3$$uFZJ
000012020 909CO $$ooai:juser.fz-juelich.de:12020$$pVDB
000012020 9131_ $$0G:(DE-Juel1)FUEK412$$bSchlüsseltechnologien$$kP42$$lGrundlagen für zukünftige Informationstechnologien (FIT)$$vGrundlagen für zukünftige Informationstechnologien$$x0
000012020 9141_ $$aProceedings$$y2010
000012020 9201_ $$0I:(DE-Juel1)VDB799$$d31.12.2010$$gIBN$$kIBN-1$$lHalbleiter-Nanoelektronik$$x0
000012020 9201_ $$0I:(DE-82)080009_20140620$$gJARA$$kJARA-FIT$$lJülich-Aachen Research Alliance - Fundamentals of Future Information Technology$$x1
000012020 970__ $$aVDB:(DE-Juel1)123488
000012020 980__ $$aVDB
000012020 980__ $$aConvertedRecord
000012020 980__ $$abook
000012020 980__ $$aconf
000012020 980__ $$aI:(DE-Juel1)PGI-9-20110106
000012020 980__ $$aI:(DE-82)080009_20140620
000012020 980__ $$aUNRESTRICTED
000012020 981__ $$aI:(DE-Juel1)PGI-9-20110106
000012020 981__ $$aI:(DE-Juel1)VDB881