TY  - CONF
AU  - Gerharz, J.
AU  - Padmaraju, K.
AU  - Moers, J.
AU  - Grützmacher, D.
TI  - Etching Titanium Nitride gate stacked on high-k dielectric
M1  - PreJuSER-12020
PY  - 2010
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/12020
ER  -