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@INPROCEEDINGS{Moers:12023,
      author       = {Moers, J. and Roeckerath, M. and Schubert, J. and Mantl, S.
                      and Grützmacher, D.},
      title        = {{C}haracterization of {G}d{S}c{O}3 layers by spectroscopic
                      ellipsometry},
      reportid     = {PreJuSER-12023},
      year         = {2010},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {EMRS},
      booktitle     = {EMRS},
      month         = {Jun},
      date          = {2010-06-07},
      organization  = {Strasbourg, Frankreich, 7 Jun 2010},
      cin          = {IBN-1 / JARA-FIT},
      cid          = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)31},
      url          = {https://juser.fz-juelich.de/record/12023},
}