%0 Conference Paper
%A Gerharz, J.
%A Padmaraju, K.
%A Moers, J.
%A Grützmacher, D.
%T Etching Titanium Nitride gate stacked on high-k dielectric
%M PreJuSER-12026
%D 2010
%Z Record converted from VDB: 12.11.2012
%< 36th international Conference on Micro & Nano Engineering MNE2010
Y2 19 Sep 2010
M2 Genoa, Italy, 
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/12026