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MOSFETs with High Mobility Channel Materials and Higher-k/Metal Gate Stack
Yu, W.FZJ* ; Durgun Özben, E.FZJ* ; Zhang, B.FZJ* ; Nichau, A.FZJ* ; Lopes, J. M. J.FZJ* ; Luptak, R.FZJ* ; Lenk, S.FZJ* ; Hartmann, J. M. ; Buca, D.FZJ* ; Bourdelle, K. K. ; Schubert, J.FZJ* ; Zhao, Q. T.FZJ* ; Mantl, S.FZJ*
2010
2010Proceeding of 10th IEEE International Conference on Solid-State and Integrated Circuit Technology ICSICT-2010. - S. 875 -878
Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
- Halbleiter-Nanoelektronik (IBN-1)
- Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
- Grundlagen für zukünftige Informationstechnologien (P42)
Appears in the scientific report
2010
Notes: Proceedings