%0 Journal Article
%A Simon, Ronnie
%A Vianden, Reiner
%A Köhler, Klaus
%T Implantation Studies on Silicon-Doped GaN
%J Journal of electronic materials
%V 42
%N 1
%C Warrendale, Pa
%I TMS
%M FZJ-2012-00509
%P 21-25
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000312660100004
%R 10.1007/s11664-012-2278-0
%U https://juser.fz-juelich.de/record/127549