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@ARTICLE{Simon:127549,
      author       = {Simon, Ronnie and Vianden, Reiner and Köhler, Klaus},
      title        = {{I}mplantation {S}tudies on {S}ilicon-{D}oped {G}a{N}},
      journal      = {Journal of electronic materials},
      volume       = {42},
      number       = {1},
      address      = {Warrendale, Pa},
      publisher    = {TMS},
      reportid     = {FZJ-2012-00509},
      pages        = {21-25},
      year         = {2013},
      cin          = {JARA-FIT / PGI-4 / JCNS-2},
      ddc          = {670},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-4-20110106 /
                      I:(DE-Juel1)JCNS-2-20110106},
      pnm          = {422 - Spin-based and quantum information (POF2-422) / 424 -
                      Exploratory materials and phenomena (POF2-424)},
      pid          = {G:(DE-HGF)POF2-422 / G:(DE-HGF)POF2-424},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000312660100004},
      doi          = {10.1007/s11664-012-2278-0},
      url          = {https://juser.fz-juelich.de/record/127549},
}