%0 Journal Article
%A Wolf, Martin
%A Roitsch, Stefan
%A Mayer, Joachim
%A Nijmeijer, A.
%A Bouwmeester, H.J.M.
%T Fabrication of ultrathin films of Ta2O5 by a sol–gel method
%J Thin solid films
%V 527
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M FZJ-2013-00432
%P 354 - 357
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000314037200062
%R 10.1016/j.tsf.2012.12.054
%U https://juser.fz-juelich.de/record/128743