%0 Book
%A Smit, Herman G.J.
%A Kivi, R.
%A Voemel, H.
%A Paukkunen, A.
%T Thin film capacitive sensors
%C New York, NY
%I Springer
%M FZJ-2013-00934
%@ 9781461439080
%P Online-Ressource
%D 2013
%F PUB:(DE-HGF)3
%9 Book
%U https://juser.fz-juelich.de/record/130566