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@BOOK{Smit:130566,
author = {Smit, Herman G.J. and Kivi, R. and Voemel, H. and
Paukkunen, A.},
title = {{T}hin film capacitive sensors},
address = {New York, NY},
publisher = {Springer},
reportid = {FZJ-2013-00934},
isbn = {9781461439080},
pages = {Online-Ressource},
year = {2013},
cin = {IEK-8},
ddc = {910.285},
cid = {I:(DE-Juel1)IEK-8-20101013},
pnm = {233 - Trace gas and aerosol processes in the troposphere
(POF2-233)},
pid = {G:(DE-HGF)POF2-233},
typ = {PUB:(DE-HGF)3},
url = {https://juser.fz-juelich.de/record/130566},
}