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037 _ _ |a FZJ-2013-00934
041 _ _ |a eng
082 _ _ |a 910.285
100 1 _ |a Smit, Herman G.J.
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245 _ _ |a Thin film capacitive sensors
260 _ _ |a New York, NY
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700 1 _ |a Kivi, R.
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700 1 _ |a Voemel, H.
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700 1 _ |a Paukkunen, A.
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