%0 Conference Paper
%A Hüpkes, Jürgen
%A Rech, B.
%A Kluth, O.
%A Müller, Joachim
%A Siekmann, Hildegard
%A Agashe, Chitra
%A Bochem, Hans Peter
%A Wuttig, Matthias
%T Material Aspects of Reactively MF-Sputtered Zinc Oxide for TCO Application in Silicon Thin Film Solar Cells
%V 762
%M FZJ-2013-01512
%@ 1-55899-699-0
%P A7.11
%D 2003
%< Materials Research Society Symposium Proceedings
%B MRS Spring Meeting
%C 21 Apr 2003 - 24 Apr 2003, San Francisco (USA)
Y2 21 Apr 2003 - 24 Apr 2003
M2 San Francisco, USA
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/132936