TY  - CONF
AU  - Hüpkes, Jürgen
AU  - Rech, B.
AU  - Kluth, O.
AU  - Müller, Joachim
AU  - Siekmann, Hildegard
AU  - Agashe, Chitra
AU  - Bochem, Hans Peter
AU  - Wuttig, Matthias
TI  - Material Aspects of Reactively MF-Sputtered Zinc Oxide for TCO Application in Silicon Thin Film Solar Cells
VL  - 762
M1  - FZJ-2013-01512
SN  - 1-55899-699-0
SP  - A7.11
PY  - 2003
T2  - MRS Spring Meeting
CY  - 21 Apr 2003 - 24 Apr 2003, San Francisco (USA)
Y2  - 21 Apr 2003 - 24 Apr 2003
M2  - San Francisco, USA
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/132936
ER  -