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@INPROCEEDINGS{Hpkes:132936,
      author       = {Hüpkes, Jürgen and Rech, B. and Kluth, O. and Müller,
                      Joachim and Siekmann, Hildegard and Agashe, Chitra and
                      Bochem, Hans Peter and Wuttig, Matthias},
      title        = {{M}aterial {A}spects of {R}eactively {MF}-{S}puttered
                      {Z}inc {O}xide for {TCO} {A}pplication in {S}ilicon {T}hin
                      {F}ilm {S}olar {C}ells},
      volume       = {762},
      reportid     = {FZJ-2013-01512},
      isbn         = {1-55899-699-0},
      pages        = {A7.11},
      year         = {2003},
      comment      = {Materials Research Society Symposium Proceedings},
      booktitle     = {Materials Research Society Symposium
                       Proceedings},
      month         = {Apr},
      date          = {2003-04-21},
      organization  = {MRS Spring Meeting, San Francisco
                       (USA), 21 Apr 2003 - 24 Apr 2003},
      cin          = {IEK-5},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {111 - Thin Film Photovoltaics (POF2-111)},
      pid          = {G:(DE-HGF)POF2-111},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/132936},
}