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@MASTERSTHESIS{Luong:133440,
      author       = {Luong, Gia Vinh},
      title        = {{L}aser {A}nnealing for shallow junction formation in {A}s
                      and {B} implanted {S}i0.64{G}e0.36 layers},
      school       = {TU Dortmund},
      type         = {Dipl.},
      reportid     = {FZJ-2013-01888},
      pages        = {94 S.},
      year         = {2012},
      note         = {TU Dortmund, Diplomarbeit, 2012},
      keywords     = {Unveröffentlichte Hochschulschrift (GND)},
      cin          = {PGI-9},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)10},
      url          = {https://juser.fz-juelich.de/record/133440},
}