TY  - JOUR
AU  - Stemme, F.
AU  - Geßwein, H.
AU  - Drahus, M. D.
AU  - Holländer, Bernhard
AU  - Azucena, C.
AU  - Binder, J. R.
AU  - Eichel, Rüdiger-A.
AU  - Haußelt, J.
AU  - Bruns, M.
TI  - Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − x Fe x )1 + x O3 − δ thin films for tunable passive microwave applications
JO  - Analytical and bioanalytical chemistry
VL  - 403
IS  - 3
SN  - 1618-2650
CY  - Berlin
PB  - Springer
M1  - FZJ-2013-01889
SP  - 643 - 650
PY  - 2012
AB  - The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, and time-of-flight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film. The incorporation of the iron dopant and the temperature-dependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. In summary, these results emphasize the RF magnetron co-sputter process as a versatile way to fabricate doped thin films.    Figure  Cross section of the RF magnetron co-sputter setup and the X-ray phototelectron spectroscopy iron spectrum of a co-sputtered iron doped Barium strontium titanate thin film    Published in the special paper collection on Solid State Analysis (FKA 16) with guest editor G. Friedbacher.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000303409600004
DO  - DOI:10.1007/s00216-011-5435-z
UR  - https://juser.fz-juelich.de/record/133441
ER  -