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@ARTICLE{Stemme:133441,
      author       = {Stemme, F. and Geßwein, H. and Drahus, M. D. and
                      Holländer, Bernhard and Azucena, C. and Binder, J. R. and
                      Eichel, Rüdiger-A. and Haußelt, J. and Bruns, M.},
      title        = {{C}haracterization of non-stoichiometric co-sputtered
                      {B}a0.6{S}r0.4({T}i1 − x {F}e x )1 + x
                      {O}3 − δ thin films for tunable passive microwave
                      applications},
      journal      = {Analytical and bioanalytical chemistry},
      volume       = {403},
      number       = {3},
      issn         = {1618-2650},
      address      = {Berlin},
      publisher    = {Springer},
      reportid     = {FZJ-2013-01889},
      pages        = {643 - 650},
      year         = {2012},
      abstract     = {The fabrication of novel iron-doped barium strontium
                      titanate thin films by means of radio frequency (RF)
                      magnetron co-sputtering is shown. Investigations of the
                      elemental composition and the dopant distribution in the
                      thin films obtained by X-ray photoelectron spectroscopy,
                      Rutherford backscattering spectrometry, and time-of-flight
                      secondary ion mass spectroscopy reveal a homogeneous dopant
                      concentration throughout the thin film. The incorporation of
                      the iron dopant and the temperature-dependent evolution of
                      the crystal structure and morphology are analyzed by
                      electron paramagnetic resonance spectroscopy, X-ray
                      diffraction, Raman spectroscopy, atomic force microscopy,
                      and scanning electron microscopy. In summary, these results
                      emphasize the RF magnetron co-sputter process as a versatile
                      way to fabricate doped thin films. Figure Cross section of
                      the RF magnetron co-sputter setup and the X-ray
                      phototelectron spectroscopy iron spectrum of a co-sputtered
                      iron doped Barium strontium titanate thin film Published in
                      the special paper collection on Solid State Analysis (FKA
                      16) with guest editor G. Friedbacher.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000303409600004},
      doi          = {10.1007/s00216-011-5435-z},
      url          = {https://juser.fz-juelich.de/record/133441},
}