%0 Conference Paper
%A Schubert, Jürgen
%T Growth of ternary rare-earth based high-k dielectrics using the pulsed laser deposition
%I FOM Leipzig
%M FZJ-2013-02147
%D 2013
M2 , Germany
%F PUB:(DE-HGF)31
%9 Talk (non-conference)
%U https://juser.fz-juelich.de/record/133748