TY  - CONF
AU  - Schubert, Jürgen
TI  - Growth of ternary rare-earth based high-k dielectrics using the pulsed laser deposition
PB  - FOM Leipzig
M1  - FZJ-2013-02147
PY  - 2013
M2  - , Germany
LB  - PUB:(DE-HGF)31
UR  - https://juser.fz-juelich.de/record/133748
ER  -