%0 Conference Paper
%A Schubert, Jürgen
%T Alternative dielectric materials for future nanoelectronics
%M FZJ-2013-02148
%D 2012
%B SBMat-MRS
%C 24 Sep 2012 - 27 Sep 2012, Florianopolis (Brazil)
Y2 24 Sep 2012 - 27 Sep 2012
M2 Florianopolis, Brazil
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/133749