TY  - CONF
AU  - Schubert, Jürgen
TI  - Alternative dielectric materials for future nanoelectronics
M1  - FZJ-2013-02148
PY  - 2012
T2  - SBMat-MRS
CY  - 24 Sep 2012 - 27 Sep 2012, Florianopolis (Brazil)
Y2  - 24 Sep 2012 - 27 Sep 2012
M2  - Florianopolis, Brazil
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/133749
ER  -