%0 Journal Article
%A Luong, Gia Vinh
%A Wirths, Stephan
%A Stefanov, S.
%A Holländer, Bernhard
%A Schubert, Jürgen
%A Conde, J. C.
%A Stoica, Toma
%A Breuer, Udo-Werner
%A Chiussi, S.
%A Goryll, M.
%A Buca, Dan Mihai
%A Mantl, Siegfried
%T Study of dopant activation in biaxially compressively strained SiGe layers using excimer laser annealing
%J Journal of applied physics
%V 113
%N 20
%@ 0021-8979
%C Melville, NY
%I American Institute of Physics
%M FZJ-2013-02679
%P 204902
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000320132100082
%R 10.1063/1.4807001
%U https://juser.fz-juelich.de/record/134538