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000134538 1001_ $$0P:(DE-Juel1)156277$$aLuong, Gia Vinh$$b0$$eCorresponding author
000134538 245__ $$aStudy of dopant activation in biaxially compressively strained SiGe layers using excimer laser annealing
000134538 260__ $$aMelville, NY$$bAmerican Institute of Physics$$c2013
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000134538 7001_ $$0P:(DE-Juel1)138778$$aWirths, Stephan$$b1
000134538 7001_ $$0P:(DE-HGF)0$$aStefanov, S.$$b2
000134538 7001_ $$0P:(DE-Juel1)125595$$aHolländer, Bernhard$$b3
000134538 7001_ $$0P:(DE-Juel1)128631$$aSchubert, Jürgen$$b4$$ufzj
000134538 7001_ $$0P:(DE-HGF)0$$aConde, J. C.$$b5
000134538 7001_ $$0P:(DE-Juel1)128637$$aStoica, Toma$$b6
000134538 7001_ $$0P:(DE-Juel1)138352$$aBreuer, Udo-Werner$$b7
000134538 7001_ $$0P:(DE-HGF)0$$aChiussi, S.$$b8
000134538 7001_ $$0P:(DE-Juel1)VDB5515$$aGoryll, M.$$b9
000134538 7001_ $$0P:(DE-Juel1)125569$$aBuca, Dan Mihai$$b10
000134538 7001_ $$0P:(DE-Juel1)128609$$aMantl, Siegfried$$b11
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