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@ARTICLE{Luong:134538,
      author       = {Luong, Gia Vinh and Wirths, Stephan and Stefanov, S. and
                      Holländer, Bernhard and Schubert, Jürgen and Conde, J. C.
                      and Stoica, Toma and Breuer, Udo-Werner and Chiussi, S. and
                      Goryll, M. and Buca, Dan Mihai and Mantl, Siegfried},
      title        = {{S}tudy of dopant activation in biaxially compressively
                      strained {S}i{G}e layers using excimer laser annealing},
      journal      = {Journal of applied physics},
      volume       = {113},
      number       = {20},
      issn         = {0021-8979},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {FZJ-2013-02679},
      pages        = {204902},
      year         = {2013},
      cin          = {ZEA-3 / PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)ZEA-3-20090406 / I:(DE-Juel1)PGI-9-20110106 /
                      $I:(DE-82)080009_20140620$},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000320132100082},
      doi          = {10.1063/1.4807001},
      url          = {https://juser.fz-juelich.de/record/134538},
}