%0 Journal Article
%A Lehmann, J.
%A Hübner, R.
%A Borany, J.V.
%A Skorupa, W.
%A Mikolajick, T.
%A Schäfer, A.
%A Schubert, Jürgen
%A Mantl, S.
%T Millisecond flash lamp annealing for LaLuO3 and LaScO3 high-k dielectrics
%J Microelectronic engineering
%V 109
%@ 0167-9317
%C [S.l.] @
%I Elsevier
%M FZJ-2013-02688
%P 381 - 384
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000321229200096
%R 10.1016/j.mee.2013.04.021
%U https://juser.fz-juelich.de/record/134555